執(zhí)行標(biāo)準(zhǔn):GB/T 30901-2014
項目 |
指標(biāo) |
||
UP級 |
UP-S級 |
||
氟化銨含量 w/% ≤ |
40.0±1.0 |
40.0±1.0 |
|
色度/Hazen ≤ |
10 |
10 |
|
PH(10g/L溶液,25℃ ≤ |
6.0-7.5 |
6.0-7.5 |
|
氯化物(以Cl計) w/(mg/kg) ≤ |
5 |
3 |
|
硝酸鹽(以NO3計) w/(mg/kg) ≤ |
5 |
3 |
|
磷酸鹽(以PO4計) w/(mg/kg) ≤ |
5 |
1 |
|
硫酸鹽(以SO4計) w/(mg/kg) ≤ |
5 |
3 |
|
鋁(Al)w/(μg/kg) ≤ |
5 |
1 |
|
砷(As)w/(μg/kg) ≤ |
5 |
1 |
|
硼(B)w/(μg/kg) ≤ |
5 |
1 |
|
鋇(Ba)w/(μg/kg) ≤ |
5 |
1 |
|
鈣(Ca)w/(μg/kg) ≤ |
5 |
1 |
|
鎘(Cd)w/(μg/kg) ≤ |
5 |
1 |
|
鉻(Cr)w/(μg/kg) ≤ |
5 |
1 |
|
銅(Cu)w/(μg/kg) ≤ |
5 |
1 |
|
鐵(Fe)w/(μg/kg) ≤ |
5 |
1 |
|
鉀(K)w/(μg/kg) ≤ |
5 |
1 |
|
鋰(Li)w/(μg/kg) ≤ |
5 |
1 |
|
鎂(Mg)w/(μg/kg) ≤ |
5 |
1 |
|
錳(Mn)w/(μg/kg) ≤ |
5 |
1 |
|
鈉(Na)w/(μg/kg) ≤ |
5 |
1 |
|
鎳(Ni)w/(μg/kg) ≤ |
5 |
1 |
|
鉛(Pb)w/(μg/kg) ≤ |
5 |
1 |
|
鈦(Ti)w/(μg/kg) ≤ |
5 |
1 |
|
銻(Sb)w/(μg/kg) ≤ |
5 |
1 |
|
錫(Sn)w/(μg/kg) ≤ |
5 |
1 |
|
鋅(Zn)w/(μg/kg) ≤ |
5 |
1 |
|
顆粒 |
(≥0.5μm)/(個/mL) ≤ |
- |
10 |
(≥0.2μm)/(個/mL) ≤ |
- |
- |
用途:該產(chǎn)品主要應(yīng)用于集成電路和超大規(guī)模集成電路芯片的清洗、蝕刻等行業(yè) 。